The CCD camera module fulfils three functions: detection of local defects, evaluation of stamper eccentricity, and verification of barcode data
The camera detects all kinds of defects on glassmasters and stampers. Especially the combination with diffraction order measurement is ideal: while diffraction identifies large defects with low contrast, the camera detects small defects with high contrast
Includes detection of all surface deviations (stamper bumps)
Stamper eccentricity evaluation: by also measuring the exact position of the inner hole, any non-uniformity in the chuck is eliminated
Barcode verification: DOMS XE-blu can read the barcode and check whether it is correct by comparing it with a code entered manually or via a hand-held barcode scanner.