||For comprehensive process and quality control of microstructured
samples, dr.schwab offers multiple technologies and solutions.
In-line or off-line systems are available or tailored individually.
The systems combine high-precision measurement and powerful data analysis with user-friendly operation.
Spot area inspection by microscope matrix camera
On microstructured devices there often are small areas which are crucial for the function. Such areas (also defined at dxf file) may additionally be inspected by high resolution microscope camera.
Analysis of periodic microstructures by diffraction
Light diffraction is a very sensitive method to check size and shape of regularly arranged microstructures with fixed distance to each other. Using a line-scan camera as 'sensor' even allows full surface evaluation, which enables the detection of certain defect types such as surface roughness, clouds or stripes, which are often quite extensive but are invisible to the usual camera inspection due to lack of contrast in zero order.